Vacuum Gauges

Excellent Accuracy, Wide Ranges, Longevity, and Long-Term Stability

Posifa Technologies’ MEMS Pirani vacuum gauges for atmosphere (ATM) to medium vacuum applications are the most economical high-performance Pirani gauges on the market. They offer excellent accuracy, wide ranges, longevity, and long-term stability, while minimizing the total cost of ownership by eliminating the need to calibrate replacement probes.

The sensing element of Posifa’s Pirani gages is based on the company’s proven second-generation thermal conductivity chip, which is made with world-class microfabrication processes that ensure precision and uniformity. The sensor chip measures thermal conductance in an embedded cavity with an integrated thermopile to achieve exceptional sensitivity and repeatability. Due to its low working temperature, it is much less susceptible to contamination than filament-based devices.

The vacuum gauges each feature an individually calibrated probe that incorporates the sensing element and digital electronics. The devices provide a 0 V - 10 V analog output through an FCC-68/RJ45 connector. The output voltages can be customized to emulate those from other manufacturers’ gauges, enabling plug-and-play replacement for enhanced performance and reduced total cost of ownership without any need to change system software or connection hardware.

Advantages of MEMS Pirani vs. Filament Gauges

Traditional Pirani gauges rely on heated filaments that are highly susceptible to contamination and physical shock. In contrast, Posifa’s MEMS vacuum gauges use a solid-state thermal conductivity chip. Because these sensors operate at a lower temperature, they are significantly less prone to oil backstreaming and particle contamination, ensuring longer-term stability and a lower total cost of ownership in industrial environments.