Vacuum Gauges

Excellent Accuracy, Wide Ranges, Longevity, and Long-Term Stability

Posifa Technologies’ MEMS Pirani gauges for atmosphere (ATM) to medium vacuum applications are the most economical high-performance Pirani gauges on the market. They offer excellent accuracy, wide ranges, longevity, and long-term stability, while minimizing the total cost of ownership by eliminating the need to calibrate replacement probes.

The sensing element of Posifa’s Pirani gages is based on the company’s proven second-generation thermal conductivity chip, which is made with world-class microfabrication processes that ensure precision and uniformity. The sensor chip measures thermal conductance in an embedded cavity with an integrated thermopile to achieve exceptional sensitivity and repeatability. Due to its low working temperature, it is much less susceptible to contamination than filament-based devices.

The vacuum gauges each feature an individually calibrated, interchangeable probe that incorporates the sensing element and digital electronics. In environments where heavy contamination is unavoidable, simply replacing the probe provides a convenient and cost-effective maintenance strategy and reduces system downtime. The devices provide 0 V - 10 V analog output through an FCC-68/RJ45 connector. The output voltages can be customized to emulate those from other manufacturers’ gauges, enabling plug-and-play replacement for enhanced performance and reduced total cost of ownership without any need to change system software or connection hardware.

Products

PMF2000 Series

General Purpose Mass Flow Sensor for Gases measuring flow rates under 10 SLM. Analog voltage and digital I2C outputs available.
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Copy of PMF2000 Series

General Purpose Mass Flow Sensor for Gases measuring flow rates under 10 SLM. Analog voltage and digital I2C outputs available.
View Datasheet

Copy of PMF2000 Series

General Purpose Mass Flow Sensor for Gases measuring flow rates under 10 SLM. Analog voltage and digital I2C outputs available.
View Datasheet

Copy of PMF2000 Series

General Purpose Mass Flow Sensor for Gases measuring flow rates under 10 SLM. Analog voltage and digital I2C outputs available.
View Datasheet

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PVC6100 Series

MEMS Pirani gauge for ATM to medium vacuum applications, the most economical high performance Pirani gauge on the market. Learn more...