MEMS Micro-Pirani Vacuum Sensor with Improved Accuracy, Repeatability and Power Efficiency

Conventional Pirani sensors use a heated wire or thermistor to measure vacuum by monitoring the heat transfer from the wire or thermistor in a vacuum environment. Posifa Technologies has revolutionized the concept of using thermal conductivity as the basis for vacuum pressure measurement by micro-machining all the components of a Pirani sensor into a single, integrated microstructure. The resulting micro-Pirani sensors offer better accuracy, repeatability, range, and power efficiency than conventional Pirani sensors, while allowing designers to miniaturize the vacuum measurement application to a greater degree than ever before. Manufactured in a state-of-the-art semiconductor CMOS fab, Posifa’s MEMS micro-Pirani sensors offer outstanding repeatability and scalability, ensuring accurate and reliable performance at a surprisingly low cost.