Vacuum Sensors

MEMS Micro-Pirani Vacuum Sensor with Improved Accuracy, Repeatability and Power Efficiency

Conventional Pirani sensors use a heated wire or thermistor to measure vacuum by monitoring the heat transfer from the wire or thermistor in a vacuum environment. Posifa Technologies has revolutionized the concept of using thermal conductivity as the basis for vacuum pressure measurement by micro-machining all the components of a Pirani sensor into a single, integrated microstructure. The resulting micro-Pirani sensors offer better accuracy, repeatability, range, and power efficiency than conventional Pirani sensors, while allowing designers to miniaturize the vacuum measurement application to a greater degree than ever before. Manufactured in a state-of-the-art semiconductor CMOS fab, Posifa’s MEMS micro-Pirani sensors offer outstanding repeatability and scalability, ensuring accurate and reliable performance at a surprisingly low cost.

Products

PMF2000 Series

General Purpose Mass Flow Sensor for Gases measuring flow rates under 10 SLM. Analog voltage and digital I2C outputs available.
View Datasheet

Copy of PMF2000 Series

General Purpose Mass Flow Sensor for Gases measuring flow rates under 10 SLM. Analog voltage and digital I2C outputs available.
View Datasheet

Copy of PMF2000 Series

General Purpose Mass Flow Sensor for Gases measuring flow rates under 10 SLM. Analog voltage and digital I2C outputs available.
View Datasheet

Copy of PMF2000 Series

General Purpose Mass Flow Sensor for Gases measuring flow rates under 10 SLM. Analog voltage and digital I2C outputs available.
View Datasheet

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PVC1000 Series

MEMS micro-Pirani vacuum sensors in TO5 or TO46 metal cans. Learn more...