New PVC6800 Series MEMS Pirani Gauges for ATM to Medium Vacuum Applications

The News

Posifa Technologies announces its new PVC6800 series of MEMS Pirani gauges for atmosphere (ATM) to medium vacuum applications. Featuring a wide range from 10-4 Torr to ATM, the gauges deliver high accuracy, long-term stability.


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Key Specifications and Benefits:
  • Measurement range: 10-3 Torr to 1,125 Torr (1.3x10-3 mbar to 1,500 mbar)
  • High accuracy and repeatability
  • Adjustable output curve for plug-and-play capability
  • More resistant to contamination due to low operating temperature
  • Temperature-compensated
     
Target Applications:
  • Freeze dryers 
  • Mass spectrometers 
  • Distillation equipment 
  • Cryogenic cylinders and tanks 
  • Vacuum furnaces 
  • Load-lock vacuum systems 
The Context

To ensure precision and uniformity, the PVC6800 series gauges’ sensing element is based on Posifa’s second-generation thermal conductivity chip, which is made with world-class microfabrication processes. For exceptional sensitivity and repeatability, the sensor chip measures thermal conductance in an embedded cavity with integrated thermopile. With a low internal heater temperature just slightly above the ambient, PVC6800 series gauges are much less susceptible to contamination than filament-based Pirani devices, enabling higher reliability and longevity.  

The output voltages can be customized to emulate those from other manufacturers’ devices, enabling plug-and-play replacement for enhanced performance and reduced total cost of ownership without any need to change system software or connection.

Availability: 

Samples and production quantities of the PVC6800 are available now.  

Download PVC6800 datasheet 
Contact our authorized distributors to order samples