New PVC6100 Series MEMS Pirani Gauges for ATM to Medium Vacuum Applications

The News

Posifa Technologies announces its new PVC6100 series of MEMS Pirani gauges for atmosphere (ATM) to medium vacuum applications. Featuring a wide range from 10-4 Torr to ATM, the gauges deliver high accuracy, long-term stability.

Key Specifications and Benefits:
  • Wide range from 10-4 Torr to ATM 
  • High accuracy, reliability, and longevity 
  • 0 V to 10 V analog output through FCC-68/RJ45 connectors 
  • Output voltages can be customized for plug-and-play replacement 
  • Resistance to contamination due to low working temperatures 
Target Applications:
  • Freeze dryers 
  • Mass spectrometers 
  • Distillation equipment 
  • Cryogenic cylinders and tanks 
  • Vacuum furnaces 
  • Load-lock vacuum systems 
The Context

To ensure precision and uniformity, the PVC6100 series gauges’ sensing element is based on Posifa’s second-generation thermal conductivity chip, which is made with world-class microfabrication processes. For exceptional sensitivity and repeatability, the sensor chip measures thermal conductance in an embedded cavity with integrated thermopile. With a low internal heater temperature just slightly above the ambient, PVC6100 series gauges are much less susceptible to contamination than filament-based Pirani devices, enabling higher reliability and longevity.  

The output voltages can be customized to emulate those from other manufacturers’ devices, enabling plug-and-play replacement for enhanced performance and reduced total cost of ownership without any need to change system software or connection.


Samples and production quantities of the PVC6100 are available now.  

Download PVC6100 datasheet 
Contact our authorized distributors to order samples